Study of influence of various rotation rates in deposition process on optical properties of SnO2 thin films by spectroscopic ellipsometry technique

چکیده مقاله

Abstract

SnO₂ thin films deposited on glass substrates using sol-gel spin coating technique. Different rotation rates including 1800, 2100 and 2400 rpm were used to deposition. Deposited SnO₂ thin films were dried at 150⁰ C for 10 min on a hot plate and then were annealed at 450⁰ C for 1 h in an air furnace. Optical properties of the prepared SnO₂ thin films such as transparency, reflectance, refractive index and absorption coefficient were determined by using spectroscopic ellipsometry technique. The optical band gap energy of prepared SnO₂ thin films were measured. The SnO₂ thin films prepared with 2100 and 2400 rpm showed the highest (3.9ev) and the lowest (3.3ev) optical band gap values, respectively.

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